Hitachi, Demonstration Lab

The complex $12 million, 25,000sf buildout for Hitachi included a 5,700sf ISO 6 cleanroom plus an open-office environment with support spaces including a break room, storage and restrooms. The work also included a data-and-server room as well as a specialty equipment area. In regards to the cleanroom, Fortis delivered a range of highly specialized elements such as the installation of two Reactive-Ion Etch tools, metrology tools and a wet hood. Infrastructure to support the cleanroom included the installation of an 11,000-gallon N2 tank, emergency generator with an ATS, O2 generator, PVAC system, AWN system, and process gas switch boxes to allow multiple gas suite outputs for the etchers. Additionally, the cleanroom is supported by ancillary spaces including a gown room, specialty gas room, receiving and storage. BIM modeling of the spec gases, power and process lines ensured the cleanroom was built to allow for future expansion without relocating existing utilities.