Hitachi, Wafer Inspection Tool Installations

To support Hitachi’s quality assurance processes, Fortis installed 10 Metrology and Inspection (MI) tools, used for post-etching inspection and verification of microscopic silicon wafers. These tools were installed within an existing cleanroom that Fortis delivered through the first phase of the Nanotechnology Innovation Center. Each tool required connections to electrical, utility gas, and acid-waste systems, including tie-ins to the mechanical room below. Concurrently, as part of the decommissioning of Hitachi’s old campus, Fortis moved wafer-inspection tools to the new training facility at the Nanotechnology Innovation Center. Our previous VDC efforts provided efficiencies and improved quality control during installation.