Hitachi, Nanotechnology Innovation Center

With a long-term relationship of more than a decade, Fortis has delivered a dozen projects for Hitachi, totaling more than 291,000sf and $124M+ in construction. Our first collaboration was a 25,000sf demonstration lab with a 5,700sf cleanroom and complex tool installation. With the on-call projects that followed, the various scopes of work included buildout of training rooms, installation of OFCI wafer etching tools; clean room modifications; and installation of systems such as abatement units, gas cabinets, high purity process gas lines, process pumps, controls and gas detection / alarms. The majority of this work took place within fully operational facilities, and it was crucial that Fortis minimize any down time for the customer. The Nanotechnology Innovation Center that followed encompassed a 230,000sf state-of-the-art facility with collaborative office spaces, labs, tools installations and more than 54,000sf of cleanrooms. The cleanroom scope includes Class 1K Cleanroom for Demonstration and Quality Assurance Labs, and Class 10K Cleanroom for a Lite Assembly Lab. The building uses waffle slab construction for vibration mitigation, utility routing from the sub-fab and laminar air flow.